The absorption of three lines [P(20), 944.2 cm−1; P(14), 949.2 cm−1; and R(24), 978.5 cm−1] of the pulsed CO2 laser (0001–1000 transition) by SiH4 was measured at various pulse energy, pulse duration, temperature, optical path length, and pressure of the compound and nonabsorbing foreign gases. In addition, low intensity infrared absorption spectrum of silane was compared with high intensity absorption characteristics for all lines of the pulsed CO2 laser. The experimental dependencies show deviations from the phenomenological Beer–Lambert law which can be considered as arising from the high intensity of an incident radiation and collisions of absorbing molecules with surroundings. These effects were included into the expression, being an extended form of the Beer–Lambert law, which reasonably approximates all experimental data. The results, except for extending knowledge on the interaction of a high power laser radiation with matter, can help understanding and planning processes leading to preparation of silicon-containing technologically important materials.
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