Two-photon polymerization (2PP) is a material processing technique employed for the production of high-resolution micro-structures. The high potential of this technique in the fabrication of structured materials, or metamaterials, have recently attracted a significant research interest. To proceed towards real applications, the mechanical properties of the material obtained by 2PP should be known. These properties depend on all the process parameters, which affect the cross-linking between the polymeric chains, and very few results are available in the literature. In this work we perform a systematic characterization of the elastic properties of femtosecond-laser-polymerized SZ2080 (hybrid organic-inorganic photoresist) by combining dynamic experimental tests and numerical simulations on properly designed microstructures. Studying the resonance frequencies of micro-cantilevers, we demonstrate the possibility of tailoring the mechanical properties of the material by changing the laser irradiation conditions. This result paves the way to the use of 2PP for the fabrication of microdevices operating in a dynamic regime with optimized material properties.
The functioning of many micro-electromechanical devices with parts oscillating at high frequencies require isolation from external vibration. Phononic crystals, presenting band-gaps in the dispersion spectrum, i.e., interval of frequency in which propagating waves are attenuated, can provide an effective solution for vibration shielding at the microscale. In the present work, we design—through numerical simulations—a 3D phononic crystal with a micrometric unit cell able to work as vibration isolator for a micro system. We exploit the direct writing technique based on two-photon polymerization to realize three prototypes of different dimensions. Experimental measurements performed with a Michelson interferometer demonstrate the effectiveness of the proposal.
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