1 The investigation results of silver, palladium and gold nanoscale particles deposition on the silicon surface in the DMSO and DMF media are presented. The influence of organic aprotic solvents on the geometry of metal particles and their distribution on the substrate is described. It is shown that solutions of stable metal complexes ([Ag (CN) 2 ]-, [AuCl 4 ]-) are the main factor in the formation of discrete nanoparticles with a small range of sizes and uniform distribution along the substrate surface, as well as nanostructured films. It has been established that the increase in temperature from 313 to 343 K changes the structure of the gold deposit from the film to the dispersed one, occurred due to a significant increase in the rate of the electrogenerating reaction on the silicon surface microanodes and desorption of organic solvents molecules from the metal nuclei.