According to the records that the too-high temperature rise of equipment leaded to accidents easily, the temperature monitoring system based on ZigBee and GPRS, RS232 technology is designed. The perception layer uses the heterogeneous network topology by adding appropriate heterogeneous nodes to ordinary ones, which are much better than the ordinary in computing power, storage capacity, etc, and this topology structure extends transmission distance. Both of them use CC2530 chips, and the heterogeneous nodes are not only responsible for collecting temperature data, but also responsible for forwarding data from ordinary nodes. The sink nodes send alarm messages to staff by GPRS, and forward data from heterogeneous nodes to a PC via RS232. The system uses Visual Studio for software design to realize the function of data processing, display and storage, in order to achieve real-time monitoring of substation equipment and early warning.
This paper presents integration challenges on M1 to CT connection in Ultra low-k Back-End-Of-Line interconnects for 40nm node and beyond. In advance IC fabrication, porous dielectric materials, such as BDII (k~2.5), are used as insulator in copper interconnects for RC delay reduction. But the materials of inter-dielectric layer are still high density SiO2-based. The difference of physical properties in materials of ILD and IMD would potentially induce connection deterioration, which would further impact product yield by Contact open fail or other issues. Cross section pictures of failing point were exhibited with a special spacer profile to illustrate the phenomenon. Solutions were proposed, through optimization of Etch, Wet clean and CMP to improve process window. Layout optimization is also suggested as OPC and DFM solution for related layers. Solutions were examined by experiments with 40nm BEOL test masks. Results of physical and electric characterization were presented and discussed.
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