Leakage current of Pt∕(Ba0.7Sr0.3)TiO3 (BST)∕YBa2Cu3O7−δ capacitors on a (001) SrTiO3 substrate was studied. By modeling a low-dielectric constant layer, a so-called dead layer, between the Pt∕BST interface as a parasitic capacitor in series with the bulk layer capacitor, the leakage current of Pt∕BST interface was well analyzed based on the modified Schottky emission equation. Furthermore, a two-step schematic energy band diagram is proposed to explain the carrier transport through the Pt∕BST interface.
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