micro-mirror to reduce the transmission loss and thus helps to This report experimentally demonstrated the fabrication increase the coupling efficiency. Till now, the fabrication and optimization of 450 micro-mirror forming process in the rocess of the micro-mirrors have been done by laser ablation polymer waveguide layer for optical interconections. The [3], grayscale lithography [4], dicing [5], X-ray lithography
The manufacturing processes of an optoelectronic printed circuit board (OEPCB) with an embedded board-level polymeric waveguide and vertical-optical channel interconnection are presented in this paper. The optoelectronic packages contain one vertical cavity surface emitting laser (VCSEL), one photo detector (PD), surface mount technology (SMT) components and one fully embedded board-level optical interconnects. The first step is to fabricate a polymeric waveguide structure with two 45-degree mirrors, and then embedded the waveguide in the center with two prepreg to form a horizontal optical channel inside a printing circuit board by a two-step laminating process. The vertical-optical channel is made by a three-step process, conformal mask forming, laser ablating and copper etching. This vertical channel is connected to the mirror of the horizontal waveguide. A wide, collimated optical beam couples a package board across a narrow, long air gap and provides a large tolerance to misalignment during the SMT process.
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