Nanomechanical resonators are routinely used for identification of various analytes such as biological and chemical molecules, viruses, or bacteria cells from the frequency response. This identification based on the multimode frequency shift measurement is limited to the analyte of mass that is much lighter than the resonator mass. Hence, the analyte can be modeled as a point particle and, as such, its stiffness and nontrivial binding effects such as surface stress can be neglected. For heavy analytes (>MDa), this identification, however, leads to incorrectly estimated masses. Using a well-known frequency response of the nanomechanical resonator in air, we show that the heavy analyte can be identified without a need for highly challenging analysis of the analyte position, stiffness, and/or binding effects just by monitoring changes in the quality factor (Q-factor) of a single harmonic frequency. A theory with a detailed procedure of mass extraction from the Q-factor is developed. In air, the Q-factor depends on the analyte mass and known air damping, while the impact of the intrinsic dissipation is negligibly small. We find that the highest mass sensitivity (for considered resonator dimensions ∼zg) can be achieved for the rarely measured lateral mode, whereas the commonly detected flexural mode yields the lowest sensitivity. Validity of the proposed procedure is confirmed by extracting the mass of heavy analytes (>GDa) made of protein and Escherichia coli bacteria cells, and the ragweed pollen nanoparticle adsorbed on the surface of the nanomechanical resonator(s) in air, of which the required changes in the Q-factor were previously experimentally measured. Our results open a doorway for rapid detection of viruses and bacteria cells using standard nanomechanical mass sensors.

Recent progress in nanotechnology has enabled to design the advanced functional micro-/nanostructures utilizing the unique properties of ultrathin films. To ensure these structures can reach the expected functionality, it is necessary to know the density, generated internal stress and the material properties of prepared films. Since these films have thicknesses of several tens of nm, their material properties, including density, significantly deviate from the known bulk values. As such, determination of ultrathin film material properties requires usage of highly sophisticated devices that are often expensive, difficult to operate, and time consuming. Here, we demonstrate the extraordinary capability of a microcantilever commonly used in a conventional atomic force microscope to simultaneously measure multiple material properties and internal stress of ultrathin films. This procedure is based on detecting changes in the static deflection, flexural and torsional resonant frequencies, and the corresponding quality factors of the microcantilever vibrating in air before and after film deposition. In contrast to a microcantilever in vacuum, where the quality factor depends on the combination of multiple different mechanical energy losses, in air the quality factor is dominated just by known air damping, which can be precisely controlled by changing the air pressure. Easily accessible expressions required to calculate the ultrathin film density, the Poisson’s ratio, and the Young’s and shear moduli from measured changes in the microcantilever resonant frequencies, and quality factors are derived. We also show that the impact of uncertainties on determined material properties is only minor. The validity and potential of the present procedure in material testing is demonstrated by (i) extracting the Young’s modulus of atomic-layer-deposited TiO2 films coated on a SU-8 microcantilever from observed changes in frequency response and without requirement of knowing the film density, and (ii) comparing the shear modulus and density of Si3N4 films coated on the silicon microcantilever obtained numerically and by present method.

Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator exposed to an investigated quantity. Their sensitivities are, therefore, determined by the resonant frequency. The higher resonant frequency and, correspondingly, higher quality factor (Q-factor) yield higher sensitivity. In solution, the resonant frequency (Q-factor) decreases causing a significant lowering of the achievable sensitivity. Hence, the nanomechanical resonator-based sensors mainly operate in a vacuum. Identification by nanomechanical resonator also requires an additional reference measurement on the identical unloaded resonator making experiments, due to limiting achievable accuracies in current nanofabrication processes, yet challenging. In addition, the mass spectrometry by nanomechanical resonator can be routinely performed for light analytes (i.e., analyte is modelled as a point particle). For heavy analytes such as bacteria clumps neglecting their stiffness result in a significant underestimation of determined mass values. In this work, we demonstrate the extraordinary capability of hybrid shape memory alloy (SMA)-based nanomechanical resonators to i) notably tune the resonant frequencies and improve Q-factor of the resonator immersed in fluid, ii) determine the Young’s (shear) modulus of prepared ultrathin film only from frequency response of the resonator with sputtered film, and iii) perform heavy analyte mass spectrometry by monitoring shift in frequency of just a single vibrational mode. The procedures required to estimate the Young’s (shear) modulus of ultrathin film and the heavy analyte mass from observed changes in the resonant frequency caused by a phase transformation in SMA are developed and, afterward, validated using numerical simulations. The present results demonstrate the outstanding potential and capability of high frequency operating hybrid SMA-based nanomechanical resonators in sensing applications that can be rarely achieved by current nanomechanical resonator-based sensors.

In this paper, in engineering practice, the computational fluid dynamics method was adopted to study the dynamic characteristics of the spring-loaded pressure relief valve. The effects of different parameters on the dynamic performance were investigated by CFD simulation. In the simulation, the damping coefficient has little influence on the discharge time and reseating pressure of the relief valve. With the decrease of spring stiffness, the reseating time of pressure relief valve increases, and reducing the spring stiffness can effectively reduce the reseating pressure. The reseating pressure decreases with the rise in the distance between the upper adjusting ring and the sealing face. This simulation results can provide a reference for the design and optimization of the structural parameters of the spring-loaded pressure relief valve.