A passive substrate integrated waveguide (SIW) sensor based on the complementary split ring resonator (CSRR) is presented for pressure detection in high-temperature environments. The sensor pressure sensing mechanism is described through circuit analysis and the electromagnetic coupling principle. The pressure sensor is modeled in high frequency structure simulator (HFSS), designed through parameter optimization. According to the optimized parameters, the sensor was customized and fabricated on a high temperature co-fired ceramic (HTCC) substrate using the three-dimensional co-fired technology and screen-printing technology. The pressure sensor was tested in the high-temperature pressure furnace and can work stably in the ambient environment of 25−500 °C and 10−300 kPa. The pressure sensitivity is 139.77 kHz/kPa at 25 °C, and with increasing temperature, the sensitivity increases to 191.97 kHz/kPa at 500 °C. The temperature compensation algorithm is proposed to achieve accurate acquisition of pressure signals in a high-temperature environment.
A novel, wireless, passive substrate-integrated waveguide (SIW) temperature sensor based on a complementary split-ring resonator (CSRR) is presented for ultra-high-temperature applications. The temperature sensor model was established by using the software of HFSS (ANSYS, Canonsburg, PA, USA) to optimize the performance. This sensor can monitor temperature wirelessly using the microwave backscatter principle, which uses a robust high-temperature co-fired ceramic (HTCC) as the substrate for harsh environments. The results are experimentally verified by measuring the S (1,1) parameter of the interrogator antenna without contact. The resonant frequency of the sensor decreases with the increasing temperature using the dielectric perturbation method, which changes from 2.5808 to 2.35941 GHz as the temperature increases from 25 to 1200 °C. The sensitivity of the sensor is 126.74 kHz/°C in the range of 25–400 °C and 217.33 kHz/°C in the range of 400–1200 °C. The sensor described in this study has the advantages of simple structure, higher quality and sensitivity, and lower environmental interference, and has the potential for utilization in multi-site temperature testing or multi-parameter testing (temperature, pressure, gas) in high-temperature environments.
This paper proposes a dual inductor-capacitor (LC) circuit integrated wireless and passive force and temperature sensor for the simultaneous measurement of force and temperature in high-temperature environments. The sensor is fabricated by a two-step process: the preparation of the Al2O3 substrate and the fabrication of the dual LC sensor with Ag paste using screen-printing technology and metallization. The variation in ambient force and temperature can be detected wirelessly by extracting the resonant frequencies of the antenna. The sensor can work in the force range of 0–10 N and temperature range of 25–500 °C with a maximum force sensitivity of 107 kHz/N at 500 °C and temperature sensitivity of 21.7 kHz/°C. To precisely measure the force, the temperature compensation method is proposed. The sensor has the advantages of low cost, simple fabrication and test, and high stability and repeatability, which are promising for the force and temperature application on the engine turbine blade in high-temperature environments.
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