0 0 S e m i c o n d U e t o r M a II U f a e t U r i n g T e e h n o l o g y W o r k s h o p
ABSTRACTCapacity management is a crucial issue of Fab production due to its highly running cost. We can have many s o f i m e packages to help us to calculate the Fab capacity in commercial market. However, unfortanately, fm of them canful/ill the requirement of our changing situation. In the real world, the relationship between the operations and tools is a complex, many-to-many interaction. Furthermore, sometimes we mayfind the WPH (Waf& per hour) of same recipe variedfrom tool to tool. Those realities make it dificult to compute tool loading and throughput. This paper describes a model based on our innovative methodology, "the natural statistic concept", to solve such problem. This model not only can provide a useful methodology to solve the calculation issues but also give us useful information for tool capacity management. It is simple and effective. Most of all, we can develop andprocess it, simp&, by using of Excel and VBA program.
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