Electron transmission through suspended graphene membranes measured with a low-voltage gated Si field emitter arrayThe MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters.
CitationRughoobur, Girish et al. "Electron transmission through suspended graphene membranes measured with a low-voltage gated Si field emitter array."
Out-of-plane focusing is essential for electron beam collimation in gated field emission sources. The focus electrode redirects electrons emitted by the tip with a wide angle towards the central axis, resulting a small focal spot at the anode. Here, we demonstrate for the first time, very high density (108 emitters/cm2) arrays of double-gated field emission electron sources with self-aligned apertures and integrated nanowire current limiters. Release of the emitters after fabrication required the combination of a highly selective dry-etch and an isotropic wet-etch to avoid the loss of the insulator between the two gates. The aperture diameters are ∼360 nm and ∼570 nm for the extractor gate and focus gate, respectively. The turn-on voltage was low (15-20) V and anode currents of 400 nA were measured at 25 V. We compared devices with different extractor gate thicknesses resulting from planarization non-uniformity, and demonstrate the influence of the focus gate on anode current. The focal spot size was measured, using a low energy phosphor screen, to be around 700 µm for a 500 µm device when the ratio was 0.35.
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