The Naval Surface Warfare Center, Indian Head Division (NSWCIHD) is applying microelectromechanical system (MEMS) technology to underwater weapon Safety and Arming (S&A) system development. MEMS technology provides an opportunity to develop a miniaturized S&A system that is more sophisticated with improved safety and reliability at a lower cost compared to current systems. An S&A system prevents premature initiation of the weapon while reliably ensuring initiation at the appropriate time. An S&A system uses multiple sensors and devices. In comparison with other weapon S&A systems, a critical aspect of underwater weapon S&A systems is the mechanical interlock system utilizing actuators and mechanical sensors. This paper describes the design, development and fabrication of S&A SLIGA device prototypes and of a SLIGA based S&A system. NSWCIHD worked with members of the HI-MEMS Alliance during design, development and fabrication. Advancements achieved by the HI-MEMS Alliance and SLIGA S&A design issues are discussed.
Development of a moving reflector type micro optical switch fabricated by deep reactive ion etching (DRIE) in silicon on insulator (SOI) substrates is presented. The device discussed is a key component in a MEMS-based safety and arming (S&A) system for use in underwater weapons. In this switch, an etched vertical sidewall reflector is electrostatically actuated in and out of the optical path between input and output optical fibers. Fabrication is performed on 100 µm thick silicon substrates with fiber alignment channels, reflectors and actuators being fabricated at the same time with a single etch step. A single pair of multimode fibers is used to transmit optical power of the order of 1000 mW at a working wavelength of 810 nm. Sources of optical loss in the system are identified and their value calculated in order to predict the overall system optical efficiency. The optical efficiency of the switch has been found to have an average value of 55% with the etched vertical sidewall mirror having an average reflectivity of 62.8%. Switching time is 10 ms from the off to the on state with a maximum operational frequency of 60 Hz. Isolation between the on and off states is 32 dB.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.