The author wishes to thank the following individuals for their contributions: • Rajen Chanchani (1745) for overseeing the implementation of the BCB/Cu HDI process at Sandia and the lithographic fabrication of the stator windings in this project. • Denise B. Webb (1745) for fabricating the wafers. • Donald Bethke (1745) for assisting with the wafer processing. • Cynthia D. Blain (2339) for soldering leads on to the wafer. • Michael P. Saavedra (14184) for cutting the permanent magnets on the micro-EDM machine. • Thomas K. Mayer (15252) for designing and fabricating the actuator test stand.
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