Ahsfrcict.-TIie paper presents the layout and the technological steps for an interdigitally integrated capacitor used ibr gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate.The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as plitlialocyanine derivatives deposition technique. Considering the different sensitivities of ptitlialocyanines derivatives, we obtained dillerent gas sensors. The .copper phthalocyanine (Cu Pc) and nickel phthalocyanine (Ni Pc) have been investigated for NO, detection. The measurement of sensors for NO, and NH3 detection will be presented as concentration versus impcdancc. The microsensors testing structures deposited with phthalocyanines were investigated by impedance nie;isureiiicnts in a vacuum chamber controlled by a gas analyzer. The measurements were made at room tempet-ature but a mriidifim temperature is applied (<~oo"c) after measurement, for cleaning the inaterial in order to reuse the scnsoi-. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.
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