Living cells and tissues experience mechanical forces in their physiological environments that are known to affect many cellular processes. Also of importance are the mechanical properties of cells, as well as the microforces generated by cellular processes themselves in their microenvironments. The difficulty associated with studying these phenomena in vivo has led to alternatives such as using in vitro models. The need for experimental techniques for investigating cellular biomechanics and mechanobiology in vitro has fueled an evolution in the technology used in these studies. Particularly noteworthy are some of the new biomicroelectromechanical systems (Bio-MEMS) devices and techniques that have been introduced to the field. We describe some of the cellular micromechanical techniques and methods that have been developed for in vitro studies, and provide summaries of the ranges of measured values of various biomechanical quantities. We also briefly address some of our experiences in using these methods and include modifications we have introduced in order to improve them.

Although advanced fluid handling using elastomeric valves is useful for a variety of lab-on-a-chip procedures, their operation has traditionally relied on external laboratory infrastructure (such as gas tanks, computers, and ground electricity). This dependence has held back the use of elastomeric microvalves for point-of-care settings. Here, we demonstrate that microfabricated microvalves, via liquid-filled control channels, can be actuated using only a handheld instrument powered by a 9 V battery. This setup can achieve on-off fluid control with fast response times, coordinated switching of multiple valves, and operation of a biological assay. In the future, this technique may enable the widely used elastomeric microvalves (made by multilayer soft lithography) to be increasingly adopted for portable sensors and lab-on-a-chip systems.

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This paper examines the use of deep reactive ion etching (DRIE) of silicon with fluorine high-density plasmas at cryogenic temperatures to produce silicon master molds for vertical microcantilever arrays used for controlling substrate stiffness for culturing living cells. The resultant profiles achieved depend on the rate of deposition and etching of a SiOxFy polymer, which serves as a passivation layer on the sidewalls of the etched structures in relation to areas that have not been passivated with the polymer. We look at how optimal tuning of two parameters, the O2 flow rate and the capacitively coupled plasma (CCP) power, determine the etch profile. All other pertinent parameters are kept constant. We examine the etch profiles produced using e-beam resist as the main etch mask, with holes having diameters of 750 nm, 1 µm, and 2 µm.