We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.
This study proposes a novel optical technique and method for in-situ roughness measurement. The speckle image was obtained by illuminating a laser beam and the reflected laser pattern image from a surface was binarizd and examined. The intensity distribution of binary image utilizes the combined effects of speckle and scattering phenomena. A new parameter of intensity distribution of binary image, Sd BD has been proposed and the surface roughness parameter Ra of machined surfaces (ground) were correlated experimentally. Measurement results demonstrate an excellent correlation between the SdBD and Ra with correlation coefficient of 0.9706. The practicality of the proposed method to in-situ roughness measurement was applied to six samples from roughness Ra 0.2 to 6.25μm (0.3 λ and 10 λ, where λ is diode laser wavelength) of steel through grinding process.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.