Development of high-performance electret materials is required to obtain a large power output of the electrostatic vibration-driven energy harvesters. In this study, by introducing aminosilane derivatives into CYTOP-based perfluorinated polymer film, we have successfully formed nano-clusters containing the organic siloxanes in the polymer electrets. Using small-angle x-ray scattering, tapping mode AFM and SEM analysis, the existence of such nano-clusters has been directly observed in the CYTOP film. It is suggested that the observed nano-clusters serve as the charge trap site and enhance the surface charge density and the thermal stability of the trapped charges. As a polymer electret, an extremely high surface charge potential of −1.6 kV with the 15 µm thick film has been obtained under the optimum condition of corona charging.
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