In this article, flower-like ZnO nanostructures were integrated with crystalline-Si interdigitated back contact photovoltaic cell by direct growth on its surface. These ZnO nanostructures not only possess the anti-reflective characteristics to increase the converting efficiency of photovoltaic cell but also serve as the humidity sensing material. For measurement of the self-powered humidity sensor, it can be seen that the measured current increased monotonically as we increased the related humidity (RH) from 40% to 95%. The plot of log-resistance as a function of RH also showed good linearity (Y = −0.0089X + 7.0914 and R2 = 0.9874).
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