Chemical mist deposition (CMD) of poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) was investigated in terms of cavitation frequency f, solvent, flow rate of nitrogen, substrate temperature T
s, and substrate dc bias V
s as variables for efficient PEDOT:PSS/crystalline silicon (c-Si) heterojunction solar cells. The high-speed-camera and differential mobility analysis characterizations revealed that the average size and flux of PEDOT:PSS mist depend on f, type of solvent, and V
s. Film deposition occurred when positive V
s was applied to the c-Si substrate at T
s of 30–40 °C, whereas no deposition of films occurred with negative V
s, implying that the film is deposited mainly from negatively charged mist. The uniform deposition of PEDOT:PSS films occurred on textured c-Si(100) substrates by adjusting T
s and V
s. The adhesion of CMD PEDOT:PSS film to c-Si was greatly enhanced by applying substrate dc bias V
s compared with that of spin-coated film. The CMD PEDOT:PSS/c-Si heterojunction solar cell devices on textured c-Si(100) in 2 × 2 cm2 exhibited a power conversion efficiency η of 11.0% with better uniformity of the solar cell parameters. Furthermore, η was increased to 12.5% by adding an AR coating layer of molybdenum oxide MoO
x
formed by CMD. These findings suggest that CMD with negatively charged mist has great potential for the uniform deposition of organic and inorganic materials on textured c-Si substrates by suitably adjusting T
s and V
s.
We investigated the chemical mist deposition (CMD) of poly(3,4‐ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) on textured crystalline silicon (c‐Si) substrate for efficient c‐Si/PEDOT:PSS heterojunction solar cells. The Mie scattering observation and differential mobility analysis characterization revealed that the average size of mist particle decreased from 330 to 30–40 nm with increasing the number density and traveling velocity of mist precursor when positive dc bias of 10 kV was applied to the c‐Si substrate. The uniform deposition of PEDOT:PSS films was performed on textured c‐Si with the increased adhesion by suitably adjusting Vs and substrate temperature. A power conversion efficiency (PCE) of 11.57% was obtained with Jsc of 36.1 mA cm−2, Voc of 0.49 V, and FF of 0.66, when a positive Vs of 10 kV was applied to c‐Si substrate. Furthermore, PCE increased to 12.5% with Jsc of 35.6 mA cm−2, Voc of 0.53 V, and FF of 0.67 by adding a 20‐nm‐thick AR coating layer of molybdenum oxide MoOx (refractive index, n = 2.1) fabricated by CMD using 12 molybdo(VI) phosphoric acid n‐hydrate [H3(PMo12O40) · nH2O] as a precursor. These findings imply that CMD using negatively charged mist precursor is a possible method for the uniform deposition of PEDOT:PSS on textured c‐Si substrate for efficient c‐Si/PEDOT:PSS heterojunction solar cells.
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