T The effect of a vacuum pre-heating on the structure, electric, and optical properties of the thermally-oxidized W-doped VO2 films was studied. The result shows that the film crystalline orientation and W inhomogeneous distribution increase after the pre-heating. It was found that the pre-heating at 700 and 800 C reduces the metal-insulator transition (MIT) hysteresis because the preferable orientation of the film along (011) direction. The film pre-heated at 900 C exhibits the undoped-like MIT due to a great increase in the W inhomogeneous distribution. The pre-heating can affect the apparent activation energy of the cool-state resistances., and increase the cool-state IR transmittances. By means of the Lorentz-Drude model, the conductance electron density (nc) and energy band gaps (Eg) were obtained and discussed. It was shown that the pre-heating can decrease the coo-state nc and affect the Eg, indicating that the electronic band structure is change by W doping.
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