The plasma-surface interaction is studied for a low temperature helium plasma jet generated at atmospheric pressure using Mueller polarimetry on an electro-optic target. The influence of the AC kHz operating frequency is examined by simultaneously obtaining images of the induced electric field and temperature of the target. The technique offers high sensitivity in the determination of the temperature variation on the level of single degrees. Simultaneously, the evolution of the electric field in the target caused by plasma-driven charge accumulation can be measured with the threshold of the order of 105 V/m. Even though a specific electro-optic crystal is used to obtain the results, they are generally applicable to dielectric targets under exposure of a plasma jet when they are of 0.5 mm thickness, have a dielectric constant greater than 4 and are at floating potential. Other techniques to examine the induced electric field in a target do not exist to the best of our knowledge, making this technique unique and necessary. The influence of the AC kHz operating frequency is important because many plasma jet designs used throughout the world operate at different frequency which changes the time between the ionization waves and hence the leftover species densities and stability of the plasma. Results for our jet show a linear operating regime between 20 and 50 kHz where the ionization waves are stable and the temperature increases linearly by 25 K. The charge deposition and induced electric fields do not increase significantly but the surface area does increase due to an extended surface propagation. Additionally, temperature mapping using a 100 μm GaAs probe of the plasma plume area has revealed a mild heat exchange causing a heating of several degrees of the helium core while the surrounding air slightly cools. This peculiarity is also observed without plasma in the gas plume.

An atmospheric pressure plasma chemical vapor deposition process designed for the site‐selective deposition of organic functional materials with a sub‐millimetric lateral resolution is presented in this study. Injecting methyl methacrylate vapor in plasma post‐discharge allowed to synthesize plasma‐polymerized methyl methacrylate (ppMMA) coatings on metallic, dielectric, and polymer substrates at close to room temperature (40°C). A circular dot, as small as 400 µm in diameter, of ppMMA is deposited and characterized by Fourier‐transform infrared spectroscopy, X‐ray photoelectron spectroscopy, and high‐resolution mass spectrometry. Oligomeric species of poly‐MMA up to n = 18 have been detected, evidencing the particularly “soft” polymerization offered by the presented process.

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A coaxial shaped atmospheric pressure plasma torch has been used to deposit the millimetric scale plasma polymer. A detailed experiment has revealed the appearance of three different kinetic regimes with distinct coating morphology: no deposition, circular dot and circular ring formation. The ratio of precursor carrier gas flow to the plasma species carrier gas flow has been identified as crucial factor to separate the three regimes. Further experiments regarding the influence of precursor mass fraction on the dimension and deposition rates has been performed for a circular dot regime to get more insights into the coating shape, size and volume and its relation to gas flow dynamics. A side by side computational fluid dynamic simulation coupled with species transport module has been performed to understand the influence of flow dynamics on coating morphology. The appearance of recirculatory vortices in-between the nozzle and substrate and its role on confinement of precursor at specific region and mixing of plasma species to precursor has been highlighted. A good correlation in between the diameter of thus coated plasma polymer in circular dot regime and the simulated confinement zone is here reported.