Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional structures due to their low power consumption, fast and stable time response, small dimensions and possibility of embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type gas sensors based on ZnO and WO 3 nanostructures. ZnO:Al nanorods with good cristallinity were obtained with electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method. The sensors were built as a nanowire network. WO 3 films with nanocrystalline surface were manufactured by deposition of a three layer WO 3 /W/WO 3 structure by RF sputtering and successive annealing of the structure in appropriate temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional conductometric type sensors.
An electrospinning technology have been developed to obtain zinc oxide nanofibres doped with aluminum. Properties of the obtained nanostructures can be controlled by both the composition of a precursor and subsequent annealing treatment. The gas sensors manufactured with the use of ZnO:Al nanofibres exhibit good response to NO 2 at relatively low operating temperatures. For some samples it was observed that interaction with ambient NO 2 gas causes the change of conductivity from n-type to p-type at higher operating temperatures. This phenomenon was not observed for the samples annealed at higher temperature.
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