Resonant frequencies of silicon ring resonators are tuned using a custom Laser 3D-printed microfluidic chip overlaid directly on the photonic circuit. A shift of a full FSR is observed at a concentration of 10% NaCl.
We demonstrate a method of tuning the resonant frequencies of silicon microring resonators using a 3D-printed microfluidic chip overlaid directly on the photonic circuit with zero energy consumption following the initial tuning. Aqueous solutions with different concentrations of NaCl are used in experimentation. A shift of a full free spectral range is observed at a concentration of 10% NaCl. On a 60 µm microring resonator, this equals a resonant wavelength shift of 1.514 nm when the index of the cladding changes by 0.017 refractive index units (RIUs), or at a rate of 89.05 nm/RIU.
We demonstrate a method to automate the tuning of microring resonators using 3D-printed microfluidic control capable of resonance wavelength shifts of 4 nm. We use a custom 3D-printer that can fabricate microfluidic devices with sub-10 μm features and that perform automatic pumping, mixing, and dilution operations.
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