We measure radio frequency electromagnetic wave total scattering cross-sections and internal radio frequency electromagnetic field distributions for several novel types of MEMs atomic vapor cells, optimized for Rydberg atombased radio frequency electric field sensing. Vapor cells that use metamaterial structures are described. The vapor cells are designed for high radio frequency transmission, uniform internal radio frequency field amplitudes, and low radar scattering cross-section. Experimental scattering data and radio frequency field amplitude maps from functioning vapor cells are presented. The total scattering cross-sections are calibrated to the total scattering cross-sections for a series of steel balls, whose scattering is quantified using Mie scattering theory. We measure across a span of radio frequencies ranging from ~1 GHz -20 GHz. The work is important for engineering Rydberg atom-based radio frequency electric field sensors for deployment in applications such as test and measurement.
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