Use of a beam of biradicaloid such as dialkyl group-III nitrene produced by the method of photodissociation of energetic compound beams (PDECB) is expected to be advantageous to the low-temperature thin-film growth of stoichiometric group-III nitride. Through the clarification of fundamental processes involved in pyrolysis as well as photolysis of dimethylgallium azide [(CH3)2GaN3], dimethylaluminum azide [(CH3)2AlN3], and dimethylboron azide [(CH3)2BN3] based on post-self-consistent field ab initio molecular orbital methods, we discuss the suitability of these possible source compounds for the production of beams of dimethylgalliumnitrene [(CH3)2GaN], dimethylaluminumnitrene [(CH3)2AlN], and dimethylboronnitrene [(CH3)2BN] by the PDECB method. The theoretical results suggested that (CH3)2GaN3 is a promising PDECB source material in that this molecule possesses the nature of unimolecular metastable dye.
Two measurement methods to determine the rate of neutral free radical production by the photo-deionization of negative ion beams ( PDINIB ) are introduced. These methods, namely, photoelectron-current measurement by low-frequency electro-modulation probe ( PMMP ) and measurement of decrease in the negative-ion beam current ( DNIC ) were employed to evaluate the production rate in a trial surface-processing apparatus developed in the author's laboratory utilizing a steady-flux refined beam of neutral free radicals produced by the PDINIB procedure. A 63Cu negative ion beam of kinetic energy E, varied up to 15 keY was irradiated with a 514.5 nm visible light beam from a 25 W CW Ar ion laser. The detection limit of the production rate by the PMMP setup was as high as 6x109 Is under the condition that E, = 15 keV, the negative ion beam current I = 4 j.tA, and the laser power P = 6 W. The DNIC method is simpler but less reliable than the PMMP method owing to larger uncertainty resulting from the fluctuation of the negative-ion beam current.
Photoelectron-current measurement by low-frequency electromodulation probe (PMMP) is proposed as a sensitive method to determine the rate Gr of neutral free radical production by the photodeionization of negative ion beams (PDINIB). The PMMP method was employed to evaluate the production rate in a trial surface-processing apparatus developed in the author’s laboratory utilizing a steady-flux refined beam of neutral free radicals produced by the PDINIB procedure. A Cu−63 negative ion beam of kinetic energy Ei varied up to 15 keV was irradiated with a 514.5 nm visible light beam from a 25 W cw Ar+ ion laser. The detection limit of the production rate by the measurement setup was 6×109/s under the conditions that Ei=15 keV, the negative ion beam current Ii=4 μA, and the laser power P=6 W. Based on the results of these basic experiments, furthermore, the photodeionization efficiency defined by eGr/Ii where e is the elementary electric charge was estimated to be 27±6% under the conditions that Ei=15 keV, Ii=40 μA, and P=18 W.
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