The multiphoton absorption of infrared radiation induced dissociation of phenyltrifluorosilane (PhSiF 3 ) in a batch reactor. End product analysis from IR MPD of neat PhSiF 3 and the mixture of PhSiF 3 and Br 2 shows that the main dissociation channels are (1) the elimination of SiF 3 and (2) the elimination of H. Silicon isotopes have been enriched under the FEL irradiation of neat PhSiF 3 at 961 cm -1 (abundance of 30 Si in PhSiF 3 was increased from 3.10 ( 0.03% to 12.3 ( 0.1%) and 925 cm -1 (abundance of 28 Si in PhSiF 3 was increased from 92.2 ( 0.9% to 96.5 ( 0.9%).
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