An investigation has been carried out on silicone etch-resists which can be exposed by electron beam irradiation. Thin silicone films with a thickness of about 5000 and 10,000A were irradiated by scanning electron beam accelerated at 10 and 25 kv, over defined area. The thicknesses of silicone films after development were measured for each different irradiation charge density; thus the exposure characteristics of a few kinds of silicones were obtained. With the most sensitive silicone, methylvinylpolysiloxane, it was possible to form developed pattern with irradiation charge density 8.8 x 10 -7 coulombs/cm ~ at 10 kv. The chemical resistances of the electron beam irradiated silicone films to the chemical reagents which were thought to be the constituents of common etchants were also investigated. It has been shown that flood-beam irradiation onto the developed silicone films was effective to increase chemical resistance and adhesive force to the substrate. Such silicone resists are practically useful to almost all etchants other than sulfuric acid.
It was found that the impact resistant property of Polyvinylchloride (PVC) could be improved by the addition of fine powdery calcium carbonate (CC) in a sufficient dispersed state, that is, an ultrasonic wave was employed in order to disperse CC into tetrahydrofuran (THF) solvent, next the THF solution of dissolved PVC was added into this dispersed solvent. After THF was evaporated, the residual mixture was blended by a heat twin roller. Through such procedure, composite materials consisting of PVC and CC were prepared. These composite materials exhibited excellent property on impact resistance. The effect was similar to that for addition of a rubber component to PVC. It could be presumed that fine powdery CC was dispersed sufficiently into PVC matrix. It was also shown that the composite materials had increased the modulus of elasticity, slightly decreased the bending strength and decreased the melting viscosity.
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