In this study, measurement standards with irregular surface topography which can be used for surface texture measuring instruments of various measurement principles are proposed, and the verification system for surface texture measuring instruments is established using the measurement standard. We have generated the software gauge data with 3D irregular surface texture using the non-causal 2D auto-regressive model (2D AR model). This model can generate periodic irregular surface topography data from specified surface texture parameters, and based on the generated software gauge data, the measurement standards were manufactured by machining with a diamond ball end mill. The short wavelength components which cannot be processed by the ball end mill were removed from the original machining data by the morphological filter. Manufactured measurement standards were measured using three types of surface texture measuring instruments. Proposed measurement standards can be used for various types of measuring instruments.
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