A cold plasma is useful for surface modification of solid materials. In this work, plasma surface modification is tried to prepare visible-light active TiO 2 particles of which the surface is doped with nitrogen. A film composed of the particles was formed on the surface of a glass substrate by spin-casting of TiO 2 sol and then was sintered at 673 K. The film was treated with argon and nitrogen plasmas, in series. The plasma-treated film revealed visible-light absorption, in addition to ultraviolet-light absorption. Photocatalytic activity of the film was evaluated by using methylene blue and visible-light (wavelength > 420 nm). An increase of the photocatalytic activity in the film will be originated by the formation of Ti-N bonds which bring about the appearance of the visible-light activity.
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