We used a spectroscopic microwave technique utilizing superconducting stripline resonators at frequencies between 3 GHz and 15 GHz to examine the charge dynamics of YbRh2Si2 at temperatures and magnetic fields close to the quantum critical point. The different electronic phases of this heavy-fermion compound, in particular the antiferromagnetic, Fermi-liquid, and non-Fermi-liquid regimes, were probed with temperature-dependent microwave measurements between 40 mK and 600 mK at a set of different magnetic fields up to 140 mT. Signatures of phase transitions were observed, which give information about the dynamic response of this peculiar material that exhibits field-tuned quantum criticality and pronounced deviations from Fermi-liquid theory.
Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity-BOX) that contains a patterned BOX layer. The patterned BOX can form a buried microchannels network, or serve as a stop layer and a buried hard-etch mask, to accurately pattern the device layer while etching it from the backside of the wafer using the cleanroom microfabrication compatible tools and methods. The use of the cavity-BOX as a buried hard-etch mask is demonstrated by applying it for the fabrication of a deep brain stimulation (DBS) demonstrator. The demonstrator consists of a large flexible area and precisely defined 80 µm-thick silicon islands wrapped into a 1.4 mm diameter cylinder. With cavity-BOX, the process of thinning and separating the silicon islands was largely simplified and became more robust. This test case illustrates how cavity-BOX wafers can advance the fabrication of various MEMS devices, especially those with complex geometry and added functionality, by enabling more design freedom and easing the optimization of the fabrication process.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.