A precise measurement of position using a Position Sensitive Detector (PSD) is fundamental in mitigating the geometric error factors that are caused by the pincushion-type distortion of these sensors. These errors can be addressed by implementing a differential localized method to significantly reduce signal to noise ratio (SNR) in PSD and the microscopy system. The differential method based on Time difference of Arrival (TDoA) is proposed and implemented in this research. The simulation and the actual results of the system further confirm the significant improvement in accuracy and precision of the system.
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