A diffraction-based optical detection method for microphone applications has been demonstrated previously [Hall et al., J. Acoust. Soc. Am. 118, 3000–3009 (2005)]. This method, coupled with proper integration techniques can produce precision measurement microphones with 24 dBA noise levels and suitable bandwidths. Thus far, these characterization studies have been performed using experimental setups, which would disturb the acoustic field due to size and non-symmetric features. In these regards, previous optical microphone test beds have been inadequate experimental platforms. This has motivated the development of a more robust integrated instrumentation microphone package for future testing and characterization. In order to meet the size restrictions for such an optical microphone platform, vertical cavity surface emitting lasers are used as light sources and small photodiode arrays are used to detect intensity variations in refracted orders of the optical detection method. The overall dimensions and shape of the package are comparable to commercially available half-inch calibration microphones and impose minimal sound field disturbance. The design is adapted to allow simple replacement and remounting for multiple microphone testing including biomimetic directional microphones [Miles et al., J. Acoust. Soc. Am. 98, 3059–3070 (1995)]. [Work partially supported by NIH Grant 5R01DC005762-03 and the Catalyst Foundation.]
Diffraction-based optical interferometric sensing has been shown to be a low-noise displacement detection method for MEMS microphones. For this method to be useful in many important applications such as hearing aids, it needs to be packaged in a small volume and should have power consumption levels suitable for operation with a battery. In this talk, we describe miniature, packaged optical microphones that use solid state vertical cavity surface emitting lasers (VCSELs) as light sources and custom designed photodetectors. The package carries silicon chips with two micromachined biomimetic differential microphones as well as an omnidirectional microphone. It is made by 3-D laser stereo lithography process and has dimensions suitable for behind-the-ear hearing aids. With this configuration, the input referred noise floor for the differential microphone is measured as 42.6dBA, limited by the VCSEL intensity noise in this particular case. In addition to miniature packaging, an optoelectronic chip including VCSEL pulser, photodetectors, transimpedance amplifiers and 1 bit Sigma-Delta ADC has been implemented in 1.5V, 0.35u CMOS technology. The second order ADC structure providing 14-bits of theoretical resolution with 64 over sampling ratio and 20 kHz input signal is described and initial characterization results are presented.
The development of novel directional microphones for hearing aids is described. The mechanisms underlying the design of these unusual microphones were inspired by our earlier study of the ears of the parasitoid fly Ormia ochracea [Miles, et al., J. Acoust. Soc. Am. 98, 3059–3070 (1995)]. The structure of Ormia’s ears inspired new approaches to the design of directional microphones that have the potential to be more sensitive and have lower thermal noise than typical miniature microphones. The mechanisms for directional hearing in this animal are discussed along with the engineering design concepts that they have inspired. Microphones have been fabricated out of silicon that employ either capacitive sensing or optical sensing to convert the diaphragm motion into an electronic signal. Measured results indicate that the directivity of these microphones is very similar to that of an ideal first-order differential microphone. In addition, novel microphone diaphragms have been fabricated that posses a second-order directional response. These can be used to achieve a significant reduction of unwanted background acoustic noise in hearing aid applications. [Work supported by NIH Grant 5R01DC005762-03, Sensing and Processing for Directional Hearing Aids, to RNM.]
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.