The fabrication of bifunctional zinc-oxide thin films remains a challenge. Here, we investigate the effects of aluminum-vanadium co-doping on the electrical conductivity and the optical transparency of zinc oxide films. We find that by co-doping, aluminum enhances film transparency via zinc-vacancy-defect substitution, while vanadium enhances electrical conductivity. The roles of two dopants and defects are interesting information that is useful to applications of transparent conductive oxides.
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