The solution of inverse problem of heterodyne differential microscope based on representation of linear part of microscope response by moments of object function is realized. The parameters of step-like object was determined with superresolution.

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We analyze the performance limit of uncooled thermo-mechanical infra-red imagers with optical readout. We have shown that for large enough frame format thermal noise of load resistance of output electronic cascade of optical readout system determines mainly the noise equivalent temperature difference, NETD, of such systems. For middle frame format they can successfully compete with micro-bolometer infra-red detectors. Higher power low noise light source for optical readout system and more exquisite phase detection enable them to be competitive in large frame format too.