We present a deep X-ray mask with integrated bent-beam electrothermal actuator for the fabrication of 3D microstructures with curved surface. The mask absorber is electroplated on the shuttle mass, which is supported by a pair of 20-lm-thick single crystal silicon bent-beam electrothermal actuators and oscillated in a rectilinear direction due to the thermal expansion of the bent-beams. The width of each bent-beam is 10 lm or 20 lm and the length and bending angle are 1 mm and 0.1 rad, respectively, and the shuttle mass size is 1 mm · 1 mm. For 10-lm-wide bent-beams, the shuttle mass displacement is around 15 lm at 180 mW (3.6 V) dc input power. For 20-lm-wide bent-beams, the shuttle mass displacement is around 19 lm at 336 mW (4.2 V) dc input power. Sinusoidal cross-sectional PMMA microstructures with a pitch of 40 lm and a height of 20 lm are fabricated by 0.5 Hz, 20-lm-amplitude sinusoidal shuttle mass oscillation.
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