Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm−1 were resolved into ten peaks, which were assigned to various carbon–fluorine and carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated.
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