This paper is concerned with a physical model of an interdigitated sensor working in a frequency range from 100 Hz to 10 MHz. A theoretical approach is proposed to optimize the use of the sensor for bioimpedance spectroscopy. The correlation between design parameters and frequency behavior in coplanar impedance sensors are described. CoventorWare software was used to model the biological medium loaded interdigital sensor in three dimensions to measure its electrical impedance. Complete system simulation by a finite element method (FEM) was used for sensor sensitivity optimization. The influence of geometrical parameters (number of fingers, width of the electrodes) on the impedance spectroscopy of the biological medium was studied. The simulation results are in agreement with the theoretical equations of optimization. Thus, it is possible to design a priori such sensor by taking into account the biological medium of interest that will load the sensor.
We present an efficient and high-sensitive thermal micro-sensor for near wall flow parameters measurements. By combining substrate-free wire structure and mechanical support using silicon oxide micro-bridges, the sensor achieves a high temperature gradient, with wires reaching 1 mm long for only 3 lm wide over a 20 lm deep cavity. Elaborated to reach a compromise solution between conventional hot-films and hot-wire sensors, the sensor presents a high sensitivity to the wall shear stress and to the flow direction. The sensor can be mounted flush to the wall for research studies such as turbulence and near wall shear flow analysis, and for technical applications, such as flow control and separation detection. The fabrication process is CMOS-compatible and allows on-chip integration. The present letter describes the sensor elaboration, design, and microfabrication, then the electrical and thermal characterizations, and finally the calibration experiments in a turbulent boundary layer wind tunnel.
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