Herein we describe an efficient low temperature (60-160 °C) plasma enhanced atomic layer deposition (PEALD) process for gallium oxide (GaO) thin films using hexakis(dimethylamido)digallium [Ga(NMe)] with oxygen (O) plasma on Si(100). The use of O plasma was found to have a significant improvement on the growth rate and deposition temperature when compared to former GaO processes. The process yielded the second highest growth rates (1.5 Å per cycle) in terms of GaO ALD and the lowest temperature to date for the ALD growth of GaO and typical ALD characteristics were determined. From in situ quartz crystal microbalance (QCM) studies and ex situ ellipsometry measurements, it was deduced that the process is initially substrate-inhibited. Complementary analytical techniques were employed to investigate the crystallinity (grazing-incidence X-ray diffraction), composition (Rutherford backscattering analysis/nuclear reaction analysis/X-ray photoelectron spectroscopy), morphology (X-ray reflectivity/atomic force microscopy) which revealed the formation of amorphous, homogeneous and nearly stoichiometric GaO thin films of high purity (carbon and nitrogen <2 at.%) under optimised process conditions. Tauc plots obtained via UV-Vis spectroscopy yielded a band gap of 4.9 eV and the transmittance values were more than 80%. Upon annealing at 1000 °C, the transformation to oxygen rich polycrystalline β-gallium oxide took place, which also resulted in the densification and roughening of the layer, accompanied by a slight reduction in the band gap. This work outlines a fast and efficient method for the low temperature ALD growth of GaO thin films and provides the means to deposit GaO upon thermally sensitive polymers like polyethylene terephthalate.

Polymer coatings are widely used to protect metals from corrosion. Coating adhesion to the base material is critical for good protection, but coatings may fail because of cathodic delamination. Most of the experimental studies on cathodic delamination use polymers to study the corrosion behavior under conditions where the interfacial chemistry at the metal(oxide)/polymer interface is not well-defined. Here, ultrathin linear and cross-linked poly(methyl methacrylate) [PMMA] coatings that are covalently bound to oxide-covered zinc via a silane linker have been prepared. For preparation, zinc was functionalized with vinyltrimethoxysilane (VTS), yielding a vinyl monomer-covered surface. These samples were subjected to thermally initiated free radical polymerization in the presence of methyl methacrylate (MMA) to yield surface-bound ultrathin PMMA films of 10-20 nm thickness, bound to the surface via Zn-O-Si bonds. A similar preparation was also carried out in the presence of different amounts of the cross-linkers ethylene glycol diacrylate and hexanediol diacrylate. Functionalized and polymer-coated zinc samples were characterized by infrared (IR) spectroscopy, secondary ion mass spectrometry (SIMS), ellipsometry, and X-ray photoelectron spectroscopy (XPS). Coating stability toward cathodic delamination has been evaluated by scanning Kelvin probe (SKP) experiments. In all cases, the covalently linked coatings show lower delamination rates of 0.02-0.2 mm h(-1) than coatings attached to the surface without covalent bonds (rates ∼10 mm h(-1)). Samples with a higher fraction of cross-linker delaminate slower, with rates down to 0.03-0.04 mm h(-1), compared to ∼0.3 mm h(-1) without cross-linker. Samples with longer hydrophobic alkyl chains also delaminate slower, with the lowest observed delamination rate of 0.028 mm h(-1) using hexanediol diacrylate. For the coatings studied here, delamination kinetics is not diffusion limited, but the rate is controlled by a chemical reaction. Several possibilities for the nature of this reaction are discussed; radical side reactions of the oxygen reduction are the most likely path of deadhesion.

Phenothiazines are redox-active, fluorescent molecules with potential applications in molecular electronics. Phosphonated phenylethynyl phenothiazine can be easily obtained in a four-step synthesis, yielding a molecule with a headgroup permitting surface linkage. Upon modifying hydroxylated polycrystalline zinc and iron, both covered with their respective native oxides, ultrathin organic layers were formed and investigated by use of infrared (IR) reflection spectroscopy, X-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (ToF-SIMS), contact angle measurement, and ellipsometry. While stable monolayers with upright oriented organic molecules were formed on oxide-covered iron, multilayer formation is observed on oxide-covered zinc. ToF-SIMS measurements reveal a bridging bidentate bonding state of the organic compound on oxide-covered iron, whereas monodentate complexes were observed on oxide-covered zinc. Both organically modified and unmodified surfaces exhibit reactive wetting, but organic modification makes the surfaces initially more hydrophobic. Cyclic voltammetry (CV) indicates redox activity of the multilayers formed on oxide-covered zinc. On the other hand, the monolayers on oxide-covered iron desorb after electrochemical modifications in the state of the oxide, but are stable at open circuit conditions. Exploiting an electronic coupling of phenothiazines to oxides may thus assist in corrosion protection.