Abstract:To test the positioning accuracy and repeatability of the linear axes of machine tools, ISO (International Standards Organization) 230-2 and ISO 230-6 are usually adopted. Auto-tracking laser interferometers (ATLI) can perform the testing for the positioning accuracy and the repeatability including x-, y-and z-axes according to ISO 230-2 as well as xy, xz, yz, and xyz diagonal lines following ISO 230-6. LaserTRACER is a kind of ATLI. One of the steps of the ISO 230-2 and -6 tests using LaserTRACER is to determine the coordinate of the LaserTRACER with respect to the home point of the machine tool. Positioning accuracy of the machine tool causes the coordinate determined error, which might influence the test result. To check on this error, this study performs three experiments. The experiment results show that the positioning error appears on the testing results.
For the development of the aviation industry, machine tools are becoming large and travel long distances, making optical alignment setup difficult. An auto-tracking laser interferometer (ATLI) is proposed and researched in this paper for the squareness error measurement of machine tools or coordinate-measuring machines (CMMs). The procedure involves measurement of only one line of an axis, and the measurement results provide us information about not only the positioning errors but also the squareness errors. This specially designed interferometer instrument can be useful in checking industrial machine tools in a short time.
An appropriate calibration positioning method is imperative to examine localized tip on nanoscale patterns for scanning probe microscopy (SPM). This paper is to develop a new nanofabrication processes for AFM tip positioning with image stitching method in tip plowing technology. Moreover, this paper adjusts the set-point amplitude (A(sp)) to develop the tip plowing technology for fabricating nanopattern on 55 nm grating gage of a silicon substrate. The developed image stitching program is based on an iterative closet point (ICP) algorithm which has six degrees of freedom alignment. A closed-loop piezo motor is used to tip approach and plow in Z-axis. Experimental result of fabricating nanobagua on 55 nm grating of silicon substrate show that the developed positioning processes with image stitching method verify the feasibility of repeatability for the tip plowing technology successfully. This developed method can be further performed by a commercial atomic force microscope (AFM) with CAD/CAM. This technology can also be applied in dip pen nanolithography (DPN), SPM oxidation lithography and related fabrication technology with AFM tips.
Geometric error measurements with traditional laser interferometers are generally complex, especially for measuring squareness errors, which require a 90° pentagonal prism. Developments in the aviation industry have made the machine tools larger and distances farther. These characteristics make the optical alignment of the measurement setup difficult. An autotracking laser interferometer (ATLI) can be used to assist engineers in shortening the inspection of time machine tools by approximately 50%. However, owing to the tracking function, the ATLI measuring result has minimal difference from the traditional laser interferometer. This uniquely designed interferometer is proposed in this paper for the geometric error measurement of machine tools or coordinate measuring machines (CMMs). This procedure involves the measurement of one line of an axis, and the measurement results provide information regarding the positioning and squareness errors. The experimental and simulation results show that when the linear positioning and squareness errors are generated simultaneously, the deviation first decreases then subsequently increases with the increase in test length. Hence, when the positioning error results, using ATLI, are applied to the compensation table of the controller in the machine tool, the engineer should check the result to determine whether the squareness is included too much to lead a not good compensation result.
Three-dimensional (3D) measuring instrument has become widely applied by manufacturers due to the fast measurement capability and the flexible measuring procedure. It is also a crucial topic to evaluate or improve the measuring performance of these instruments, including the contact type like coordinate measuring machines (CMM) or the non-contact type like structure light scanners. Recently, the most commonly used standard feature is a sphere with a non-specular surface. It is because the ceramic materials is used to ensure the durability of the standard spheres, or is limited by the measuring principle of structure light scanners where the measured objects need to be lambertian surface. In the light of these limitations, the interferometry methods could not directly calibrate these standard spheres. In order to calibrate the radius and form of a non-specular sphere, this research focuses on the tactile method of spheres reciprocity method based on the previous researches. More details of the measuring principle and the formulas would be discussed. Final, the uncertainty of this method is evaluated using Monte Carlo method. The evaluated result of uncertainty is less than 10 nm for 15 mm radius sphere. This is very useful for common 3D measuring instrument calibration.
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