In the course of the publication the design, fabrication, and experimental evaluation of a planar microcoil for nuclear magnetic resonance ͑NMR͒ spectroscopy with a 360 m inner diameter integrated to a low-noise metal-semiconductor field-effect transistor is presented. The impedance matching of the coil and transistor was achieved by adjusted coil geometry, while an appropriate microfabrication process including air bridge contacts and a multilayer metal stack was developed for the necessary susceptibility matching of the coil metallization. The NMR spectra of experiments in an 11.75 T magnet ͑corresponding to 500 MHz͒ show the amplification of the signal by the integrated transistor. Due to previous experiments, we wanted to ensure that the whole signal emerged from the sensitive volume of the microcoil.
Übersicht in den vorangegangenen Jahren wurden sowohl auf dem Gebiet der integrierten Millimeterwellen-Schaltungen auf Silizium (SIMMWIC) als auch im Bereich der Mikrosystemtechnik große Fortschritte erzielt. Beide Entwicklungen zusammen ermöglichen die Herstellung mikromechanischer kapazitiver Schalter, die bis weit in den Millimeterwellen-Bereich sehr gute Hochfrequenzeigenschaften aufweisen. In der vorliegenden Arbeit werden koplanare Brücken-und Längsschalter vorgestellt und hinsichtlich ihrer Eignung für eine Anwendung in KFZ-Rundumsichtanwendungen diskutiert. Dies umfaßt neben einer Einführung in den Systemhintergrund die genaue Betrachtung der Hochfrequenzeigenschaften. Zudem wird auf die für eine Anwendung sehr wichtigen Aspekte der mechanischen Eigenschaften, der Bauelemente-Zuverlässigkeit sowie der Verpackungs-wie Aufbau-und Verbindungstechnik eingegangen sowie das Potential für eine weiterführende Systemintegration aufgezeigt.
AbstractIn recent years, great advances have been made in the field of silicon millimeter-wave integrated circuits (SIMM-WIC) as well as in microsystems technology. These developments jointly allow the preparation of micromechanical capacitive switches, which exhibit excellent RF properties far into the millimeter-wave frequency range. This paper presents coplanar bridge and longitudinal switches and discusses their applicability for automotive surround sensing system. It comprises a detailed review of RF properties in addition to an introduction to the systems background. Further, aspects are treated which are important for the application, as mechanical properties, reliability, and packaging and mounting technologies. Finally, the potential for further systems integration will be shown. Für die Dokumentation Mikromechanik / Schalter / Millimeterwelle / Radar / Integration planare Array-Antenne SRR-Sensoren 70 * Robert Bosch GmbH, Zentrale Forschung und Vorausentwicklung Bild 2.1: Elektronisch schwenkbare Antennen für zukünftige KFZ-Radar-Rundumsensorik Brought to you by | Monash University Library
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