The reaction mechanism of area-selective atomic layer deposition (AS-ALD) of AlO thin films using self-assembled monolayers (SAMs) was systematically investigated by theoretical and experimental studies. Trimethylaluminum (TMA) and HO were used as the precursor and oxidant, respectively, with octadecylphosphonic acid (ODPA) as an SAM to block AlO film formation. However, AlO layers began to form on the ODPA SAMs after several cycles, despite reports that CH-terminated SAMs cannot react with TMA. We showed that TMA does not react chemically with the SAM but is physically adsorbed, acting as a nucleation site for AlO film growth. Moreover, the amount of physisorbed TMA was affected by the partial pressure. By controlling it, we developed a new AS-ALD AlO process with high selectivity, which produces films of ∼60 nm thickness over 370 cycles. The successful deposition of AlO thin film patterns using this process is a breakthrough technique in the field of nanotechnology.

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We developed and fabricated the world's highest resolution (18 megapixel, 1443 ppi) OLED on glass display panel. The design uses a white OLED with color filter structure for high density pixelization and an n-type LTPS backplane for faster response time than mobile phone displays. A custom high bandwidth driver IC was fabricated. We developed a foveated pixel pipeline appropriate for virtual reality and augmented reality applications, especially mobile systems.

Nonholonomic mobile robots have constraints imposed on the motion that are not integrable, i.e., the constraints cannot be written as time derivatives of some function of the generalized coordinates. The position control of nonholonomic mobile robots has been an important class of control problems. In this paper, we propose a robust tracking control of nonholonomic wheeled mobile robots using sliding mode. The posture of a mobile robot is represented by polar coordinates and the dynamic equation of the robot is feedback-linearized by the computed-torque method. A novel sliding mode control law is proposed for asymptotically stabilizing the mobile robot to a desired trajectory. It is shown that the proposed scheme is robust to bounded external disturbances. Experimental results demonstrate the effectiveness of accurate tracking capability and the robust performance of the proposed scheme.Index Terms-Nonholonomic wheeled mobile robots, sliding mode control, trajectory tracking.

We successfully realized world first 77-inch transparent flexible OLED display with Ultra High Definition (UHD) resolution, which can be rolled up to a radius of 80 mm with a transmittance of 40%. The process flow and key technologies to fabricate a large size transparent flexible OLED panel will be discussed.