Polyvinyl alcohol cryogel, (PVA-C) is presented as a vessel mimicking material for use in anatomically realistic Doppler flow phantoms. Three different batches of 10 % wt PVA-C containing (i) PVA-C alone, (ii) PVA-C with anti-bacterial agent and (iii) PVA-C with silicon carbide particles were produced, each with 1 to 6 freeze-thaw cycles. The resulting PVA-C samples were characterized acoustically (over a range 2.65 -10.5 MHz) and mechanically in order to determine the optimum mixture and preparation for mimicking the properties of healthy and diseased arteries found in vivo. This optimum mix was reached with the PVA-C with anti-bacterial agent sample, prepared after 2 freeze/thaw cycles, which achieved a speed of sound of 1538 ± 5 m s -1 and a Young's elastic modulus of 79 ± 11kPa.This material was used to make a range of anatomically-realistic flow phantoms with varying degrees of stenoses, and subsequent flow experiments revealed that higher degrees of stenoses and higher velocities could be achieved without phantom rupturing compared to a phantom containing conventional wall-less vessels. KeywordsPolyvinyl alcohol cryogel, vessel mimic, ultrasound phantom, anatomically realistic flow phantom, acoustic and mechanical characterisation 1

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With the introduction of the NXE:3400B scanner, ASML has brought EUV to High-Volume Manufacturing (HVM). The high EUV power of >200W being realized with this system satisfies the throughput requirements of HVM, but also requires reconsideration of the imaging aspects of spectral purity, both from the details of the EUV emission spectrum and from the DUV emission. This paper will present simulation and experimental results for the spectral purity of high-power EUV systems, and the imaging impact of this, both for the case of with and without a pellicle. Also, possible controls for spectral purity will be discussed, and a novel method will be described to measure imaging impact of varying CE and DUV. It will be shown that CE optimization towards higher source power leads to reduction in relative DUV content, that the small deltas in EUV source spectrum for higher power do not influence imaging. It will also be shown that resulting variations in DUV do not affect imaging performance significantly, provided that a suitable reticle black border is used. In short, spectral purity performance is not a bottleneck for increasing power of EUV systems to well above 250W.

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