In 2 S 3 buffer layers have been prepared using the spray ion layer gas reaction deposition technique for chalcopyrite-based thinfilm solar cells. These buffers deposited on commercially available Cu(In,Ga)(S,Se) 2 absorbers have resulted in solar cells with certified record efficiencies of 16.1%, clearly higher than the corresponding CdS-buffered references. The deposition process has been optimized, and the resulting cells have been studied using current-voltage and quantum efficiency analysis and compared with previous record cells, cells with a thermally evaporated In 2 S 3 buffer layer and CdS references.
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