A floating hairpin resonator probe is used to measure electron density within the radiofrequency cycle of a parallel plate capacitively coupled plasma at steady state. A time resolution capable of detecting electron density oscillations within the radiofrequency cycle is demonstrated. Electron density oscillations are observed at the drive frequency over a range of operating conditions including 10-250 mTorr (1.3-33 Pa) in argon driven at 13.56 or 27.12 MHz. Localized electron density oscillation amplitudes show moderate agreement with literature and fluid simulations near the powered electrode and disagreement in the plasma bulk. The technique is useful for studying electron heating mechanisms in radiofrequency discharges due to its high time resolution.

In situ plasma diagnostics present the classical problem of the scientific measurement: how does one accurately measure a system without also perturbing it? The uncertainty in the degree of perturbation then reflects an inherent uncertainty in the diagnostic results. Microwave probes are no exception. This work discusses an experimental methodology for quantifying the local perturbation in hairpin resonator probe measurements. By pulsing the delivered power to a plasma, an electron density hairpin spike (HS) is readily detected at generator shutoff. The phenomenon is understood to arise from an apparent density rise as the plasma sheath collapses, thus raising the spatially averaged density measured between the hairpin tines. Other explanations for the density rise are eliminated, and the utility of the HS is presented. Under the conditions investigated, the HS provides an experimental comparison to a previous sheath correction factor developed by Sands et al.

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