We describe a micromachined Coulter counter with multiple sensing microchannels for quantitative measurement of polymethacrylate particles and pollen. A unique design with sensing microelectrodes in the center of the microchannels is demonstrated. This design creates isolation resistances among channels, and thus circumvents the crosstalk caused by automatic electrical connection among microchannels. When implemented using microfluidic channels, this design is appropriate for the sensing of microscale particles in deionized water or in dilute electrolyte solution. Our design has multiple channels operating in parallel, but integrated with just one sample reservoir and one power source. The results with a four-channel device show that this device is capable of differentiating and counting micro polymethacrylate particles and Juniper pollen rapidly. Moreover, the device throughput is improved significantly in comparison to a single-channel device. The concept can be extended to a large number of sensing channels in a single chip for significant improvement in throughput.

A microfluidic device based on an inductive Coulter counting principle to detect metal wear particles in lubrication oil is presented. The device detects the passage of ferrous and nonferrous particles by monitoring the inductance change of an embedded coil. The device was tested using iron and copper particles ranging in size from 50 to 125 lm. The testing results have demonstrated that the device is capable of detecting and distinguishing ferrous and nonferrous metal particles in lubrication oil; such particles can be indicative of potential machine faults in rotating and reciprocating machinery.

We demonstrate a high throughput, all-electronic Coulter-type sensor with four sensing microapertures to detect and count micro-scale particles. Four particle samples are utilized for this study: polymethacrylate particles 40 µm and 20 µm in diameter, Juniper Scopulorum (Rocky Mountain Juniper) pollen and Cottonwood pollen particles. The two types of pollen particles are roughly 20 µm in diameter. The particles are mixed with deionized water and forced to pass through the microapertures. Voltage pulses across all four apertures are recorded and analysed. Results demonstrate that the sensor can detect and count particles through its four sensing apertures simultaneously. Thus, the counting efficiency of the four-aperture sensor is approximately 300% higher than that of a single-channel Coulter counter, while maintaining the same accuracy, sensitivity and reliability. The counting efficiency can be improved further by integrating more sensing channels on a single micromachined chip. Results also demonstrate that the device can be used to differentiate between pollen and polymethacrylate particles; differentiation is based on a difference in surface charge for the two types of particles.

A microfluidic device based on the capacitance Coulter counting principle to detect metal debris particles in lubricant oil is presented. The device scans each individual metal debris particle as they pass through a microfluidic channel by monitoring the capacitance change. We first proved the feasibility of using the capacitance Coulter counting principle for detecting metal particles in a fluidic channel. Next, we tested the microfluidic device with aluminum abrasive particles ranging from 10 to 25 μm; the testing results show the microfluidic device is capable of detecting metal wear particles in low-conductive lubricant oil. The design concept demonstrated here can be extended to a device with multiple microchannels for rapid detection of metal wear particles in a large volume of lubricant oil.

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