Optical emission spectroscopy (OES) is a common method for characterizing radio frequency (RF) discharge plasmas. Particulary, helicon plasma is featured by its high plasma density among all RF-excited plasmas. In order to obtain the spatial-resolved information of a helicon plasma, local optical emission spectroscopy (LOES) with a 3 mm spatial resolution was proposed and carried out to evaluate the local electron density and temperature. The plasma emission intensity via LOES was measured and compared with the electron density obtained by a RF-compensated Langmuir probe (LP) in Ar, N 2 and Air helicon plasmas, respectively. The results revealed that there existed a functional relationship between some specific lines (LOES) and electron density (LP). Further, helicon plasma characteristics under capacitive (E) , inductive (H), and helicon (W) modes were systemetically investigated based on LOES. Besides, two-dimensional (2D) contour maps for plasma distributions were made via LOES as well. It was found that in E-and H-modes, axial profiles of plasma density and electron temperature were consistent under two opposite magnetic field directions. However, in W-mode, the plasma presented an asymmetric axial profile along the tube. As for radial profiles, plasma distribution varied under three discharge modes due to different heating mechanisms in Ar, N 2 or Air helicon plasma. A deeper analysis indicated that the bulk absorption comes from the coupling of the helicon wave in Ar helicon plasma while the power depositions in N 2 and Air helicon plasma are mainly dominated by the TG wave.

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The experimental and calculated results of uniformity in a glow dielectric barrier discharge (DBD) under sub-atmospheric pressures are reported. Driven by a square-wave power source, the discharge in a parallel-electrode DBD system shows uniform or various lateral structures under different conditions. There exists a critical frequency below which the DBD is uniform for almost all the applied voltages. Above the critical frequency, a non-uniform (patterned) discharge is observed and the patterned structures change with frequency and voltage. A two-dimensional fluid modeling is performed on this DBD system which shows similar results in agreement with the experiments. The simulations reveal that the distribution of the space electron density at the beginning of each voltage pulse plays an important role in achieving the uniformity. Uniform space charge results in a uniform DBD. The patterned DBD always evolves from the initial uniform state to the eventual non-uniform one. During this process, the space electrons form a patterned distribution ahead of the surface charges and lead to non-uniform discharge channels.