Abstract. Nano-sized ZrO2 powders were synthesized by hydrothermal method with two types of surfactants (cetyltrimethyl ammonium bromide (cationic surfactant, CTAB), and sodium dodecylbenzene sulfonate (anionic surfactant, SDBS)). The phase structures and morphologies of the products were investigated by X-ray diffraction and scanning electron microscope. The sample with CTAB as surfactant (ZrO2-C) shows larger specific surface area and smaller particle size than ZrO2-S. The humidity sensor fabricated by ZrO2-C shows higher performance than the sample used SDBS as surfactant. The impedance of the ZrO2-C sensor decreases by about four orders of magnitude with relative humidity (RH) changed from 11 to 95%. The response and recovery time are 60 and 70 s, respectively. These results indicate that the performance of ZrO2 humidity sensors can be improved effectively by the addition of cationic surfactant.
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