This study proposes trenching piezoelectric (PZT) material in a thicker PZT pyroelectric cell to improve the temperature variation rate to enhance the efficiency of thermal energy-harvesting conversion by pyroelectricity. A thicker pyroelectric cell is beneficial in generating electricity pyroelectrically, but it hinders rapid temperature variations. Therefore, the PZT sheet was fabricated to produce deeper trenches to cause lateral temperature gradients induced by the trenched electrode, enhancing the temperature variation rate under homogeneous heat irradiation. When the trenched electrode type with an electrode width of 200 μm and a cutting depth of 150 μm was used to fabricate a PZT pyroelectric cell with a 200 μm thick PZT sheet, the temperature variation rate was improved by about 55%. Therefore, the trenched electrode design did indeed enhance the temperature variation rate and the efficiency of pyroelectric energy converters.
This paper proposes the idea of etching PZT to improve the temperature variation rate of a thicker PZT sheet in order to enhance the energy conversion efficiency when used as pyroelectric cells. A partially covered electrode was proven to display a higher output response than a fully covered electrode did. A mesh top electrode monitored the temperature variation rate and the electrode area. The mesh electrode width affected the distribution of the temperature variation rate in a thinner pyroelectric material. However, a pyroelectric cell with a thicker pyroelectric material was beneficial in generating electricity pyroelectrically. The PZT sheet was further etched to produce deeper cavities and a smaller electrode width to induce lateral temperature gradients on the sidewalls of cavities under homogeneous heat irradiation, enhancing the temperature variation rate.
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