In terms of good optical properties and high thermal stability, Mo/Si3N4/Mo/Si3N4/SiO2 coatings based on metal/dielectric multilayer structure were adapted to the solar selective coating at high operating temperatures. The coatings exhibited high solar absorptance in the range of 0.924 ~ 0.936 and low thermal emittance of 0.114 ~ 0.118. The coatings deposited on quartz substrates were thermally stable up to 625 °C in air for 2 h, while they were degraded at 650 °C from the characterization of the absorptance and emittance. The degradation of the coatings was mainly due to the oxidation of molybdenum in air, which was confirmed by Raman spectroscopy. Compared with the thermal stability in air, the coatings were much more stable in vacuum under high temperature. The remarkable thermal stability of the Mo/Si3N4/Mo/Si3N4/SiO2 coatings in air and in vacuum makes them suitable to be applied at high temperature applications.
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