Molybdenum nitride thin film was deposited on silicon wafer with the reactive sputter deposition. γ-Mo2N thin film was obtained with nitrogen content in sputtering gas varying from 10% to 30%. An amorphous structure was observed in the thin film deposited at 50% nitrogen. Crystallinity of Mo-N thin film decreased as the total sputtering gas pressure increased. SEM examinations showed that the surface morphology of Mo-N thin films varies with the nitrogen content in the sputtering gas. The sheet resistivity of as deposited thin film increases with increasing nitrogen content in sputtering gas. The amorphous thin film deposited at 50% nitrogen survived 700°C/5min thermal annealing without obvious crystallization but failed after 800°C/5min thermal annealing, in which the crystalline γ-Mo2N and h-MoSi2 phases were observed. Sheet resistivity measurement showed a decrease in thin film resistivity with increasing thermal annealing temperatures.
Chromium and chromium nitride coatings on steels have been prepared with pulsed dc magnetron sputter deposition at a frequency of 185 kHz and a duty cycle of 96%. The coating process was carried out at 150 W with the substrate temperature maintained at 200°C. For nitride coatings, reactive sputter deposition was carried out in Ar with 3, 5, or 7%N2. Heat treatments were performed for coated steels with an infrared (IR) processing technique in an attempt to modify the interfaces and change coating properties. T he heat treatment was carried out at 400°C for 2 and 5 min. Characterisation of coated samples included X-ray diffraction (XRD), optical microscopy, and microhardness tests to verify the effect of the heat treatment. Results from XRD analysis indicated that IR heat treatment at 400°C for 2 or 5 min did not change the phases present in the coatings. Optical images of the coating microstructure show that cracks were developed on coatings deposited under 7%N2 even after only 2 min heat treatment at 400°C. Severity of cracking is reduced for coatings deposited under low nitrogen contents. No cracks were observed on coatings deposited without nitrogen. Microhardness measurements showed that for all coated specimens, 2 min IR treatment at 400°C gave the highest microhardness. For samples treated for 5 min, the microhardness decreased. X-ray diffraction analysis with slow scanning showed that CrN peaks were developed in the coatings deposited under 7%N2 and heat treated at 400°C for 2 and 5 min.
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