The reliable, high-sensitive, wireless, and affordable requirements for humidity sensors are needed in high-precision measurement fields. Quartz crystal microbalance (QCM) based on the piezoelectric effect can accurately detect the mass changes at the nanogram level. However, water-capture materials deposited on the surface of QCM generally show disadvantages in either cost, sensitivity, or recyclability. Herein, novel QCM-based humidity sensors (NQHSs) are developed by uniformly depositing green microspheres (GMs) of natural polymers prepared by the chemical synthesis of the emulsification/inner gel method on QCM as humidity-sensitive materials. The NQHSs demonstrate high accuracy and sensitivity (27.1 Hz/% RH) owing to the various hydrophilic groups and porous nano-3D deposition structure. Compared with the devices deposited with a smooth film, the frequency of the NQHSs shows almost no changes during the cyclic test and exhibits long-term stability. The NQHSs have been successfully applied to non-contact sensing human activities and remote real-time humidity monitoring via Bluetooth transmission. In addition, the deposited humidity-sensitive GMs and QCM substrate are fully recycled and reused (72% of the original value). This work has provided an innovative idea to construct environmental-friendly, high-sensitivity, and wireless humidity sensors.
The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.
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